RTDP10 oil diffusion pump is newest development pump for extremely
high vacuum and large pumping speed.
The diffusion pump is used in vacuum coating system, optical
coating machine, magnetron sputtering coating system, arc
evaporation and thermal evaporation metallizing coaters; vacuum
melting and drying system, also the vacuum furnace area for high
1. Special designed cold trap unit and water - cooled device to
guarantee low oil back- streaming rates into the vacuum chamber,
avoid coating contamination.
2. Heating System: The heating cartridges are interior assemble,
highly reduced the heating energy's lost, reducing the warming-up
3. Pump body material: Stainless Steel 304, highly improved the
ultimate vacuum pressure data, reducing raw material's gasing - out
in high vacuum pressure environment.
4. Cold trap: is with cooper material, U shape design, enhanced the
5. Stable: working time up to 7200 hrs without stop;
6. Easy maintenance.
7. High Vacuum pumping speeds in the fine and high vacuum ranges,
especially for optical and thermal evaporation coating system,
keeping a stable vacuum range for base/working vacuum data.
RTDP10 oil diffusion pump technical data:
|Item||Performance and Description|
|High vacuum flange connection||ISO250|
|Fore vacuum flange connection||ISO80|
|Ultimate Pumping Speed (L/S) without water-cooled coldtrap||3000|
|Cooling Method||Rycle cooled water|
|Actual Pumping Speed (with water-cooled cold trap)(L/S)||>1600|
|Ultimate Total Pressure(Pa)||2.0E-05|
|Critical backpressure (Pa)||36pa|
|Full Load critical backpressure (Pa)||30pa|
|Pump Fluid (Oils. Grease, Lubricants)||275# High Vacuum Silicon Oil / DC705 / KS-3|
|Oil Filling Consumption||2L|
|Pump oil suck-back flow rate mg/cm2.min)||<e-5mg< td="">< E-5mg/cm2.min|
|Cooling Water Consumption(L/S)||3L/S|
|Heating up time (min)||30min|
RTDP10 oil diffusion pump layout
Pumping Speed without cold trap device
Pumping Speed with cold trap device
Please contact us for your applications, we are honored to serve
you with our excellent service and quality.